BS-4020B Trinocular Industrial Wafer Inspection Microscope

BS-4020B industrial inspection microscope has been specially designed for inspections of various size wafers and large PCB. This microscope can provide a reliable, comfortable and precise observation experience. With perfectly performed structure, high-definition optical system and ergonomical operating system, BS-4020B realizes professional analysis and meets various needs of research and inspection of wafers, FPD, circuit package, PCB, material science, precision casting, metalloceramics, precision mould, semiconductor and electronics etc.


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BS-4020 Industrial Inspection Microscope

Introduction

BS-4020B industrial inspection microscope has been specially designed for inspections of various size wafers and large PCB. This microscope can provide a reliable, comfortable and precise observation experience. With perfectly performed structure, high-definition optical system and ergonomical operating system, BS-4020 realizes professional analysis and meets various needs of research and inspection of wafers, FPD, circuit package, PCB, material science, precision casting, metalloceramics, precision mould, semiconductor and electronics etc.

1. Perfect microscopic illumination system.

The microscope comes with Kohler illumination, provides bright and uniform illumination throughout the viewing field. Coordinated with infinity optical system NIS45, high NA and LWD objective, perfect microscopic imaging can be provided.

illumination

Features

BS-4020 Industrial Inspection Microscope Wafer Holder
BS-4020 Industrial Inspection Microscope Stage

Bright field of Reflected illumination

BS-4020B adopts an excellent infinity optical system. The viewing field is uniform, bright and with high color reproduction degree. It is suitable to observe opaque semiconductors samples.

Dark field

It can realize high-definition images at dark field observation and carry-on high sensitivity inspection to the flaws such as fine scratches. It is suitable for surface inspection of samples with high demands.

Bright field of transmitted illumination

For transparent samples, such as FPD and optical elements, the bright field observation can be realized by condenser of transmitted light. It can also be used with DIC, simple polarization and other accessories.

Simple polarization

This observation method is suitable for birefringence specimens such as metallurgical tissues, minerals, LCD and semiconductor materials.

Reflected illumination DIC

This method is used to observe small differences in precision molds. The observation technique can show the tiny height difference which cannot be seen in an ordinary observation way in the form of embossment and three-dimensional images.

bright field of reflected illumation
Dark field
bright field screen
simple polarization
10X DIC

2. High quality Semi-APO and APO Bright field &Dark field objectives.

By adopting multilayer coating technology, NIS45 series Semi-APO and APO objective lens can compensate spherical aberration and the chromatic aberration from ultraviolet to near infrared. The sharpness, resolution and color rendition of the images can be guaranteed. The image with high-resolution and flat image for various magnifications can be got.

BS-4020 Industrial Inspection Microscop Objective

 3. The operating panel is in the front of the microscope, convenient to operate.

The mechanism control panel is located in the front of the microscope (near the operator), which makes the operation more quickly and conveniently when observing the sample. And it can reduce the fatigue caused by long time observation and the floating dust brought by a big range of movement.

front panel

4. Ergo tilting trinocular viewing head.

The Ergo tilting viewing head can make the observation more comfortable, so as to minimize the muscle tension and discomfort caused by long hours of working.

BS-4020 Industrial Inspection Microscope Head

5. Focusing mechanism and fine adjustment handle of stage with low hand position.

The focusing mechanism and fine adjustment handle of stage adopt the low hand position design, which conforms to the ergonomic design. Users no need to raise hands when operating, which gives the greatest degree of comfortable feeling.

BS-4020 Industrial Inspection Microscope Side

6. The stage has a built-in clutching handle.

The clutching handle can realize the fast and slow movement mode of the stage and can quickly locate large-area samples. It will no longer be difficult to locate the samples quickly and accurately when co-using with the fine adjustment handle of stage.

7. Oversized stage (14”x 12”) can be used for large wafers and PCB.

The areas of microelectronics and semiconductor samples, especially wafer, tend to be large, so ordinary metallographic microscope stage cannot meet their observation needs. BS-4020B has an oversized stage with a large movement range, and it is convenient and easy to move. So it is an ideal instrument for microscopic observation of large area industrial samples.

8. 12” wafers holder comes with the microscope.

12” wafer and smaller size wafer can be observed with this microscope, with fast and fine movement stage handle, it can greatly improve the working efficiency.

9. Anti-static protective cover can reduce dust.

Industrial samples should be far away from floating dust, and a bit of dust can affect product quality and test results. BS-4020B has a large area of anti-static protective cover, which can prevent from the floating dust and fall dust so as to protect the samples and make the test result more accurate.

10. Longer working distance and high NA objective.

The electronic components and semiconductors on circuit board samples have difference in height. Therefore, long working distance objectives have been adopted on this microscope. Meanwhile, in order to satisfy the industrial samples’ high requirements on color reproduction, the multilayer coating technology has been developed and improved over the years and BF&DF semi-APO and APO objective with high NA are adopted, which can restore the real color of samples.

11. Various observation methods can meet diverse testing requirements.

Illumination

Bright Field

Dark Field

DIC

Fluorescent Light

Polarized Light

Reflected Illumination

Transmitted Illumination

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Application

BS-4020B industrial inspection microscope is an ideal instrument for inspections of various size wafers and large PCB. This microscope can be used in universities, electronics and chips factories for research and inspection of wafers, FPD, circuit package, PCB, material science, precision casting, metalloceramics, precision mould, semiconductor and electronics etc.

Specification

Item Specification BS-4020A BS-4020B
Optical System NIS45 Infinite Color Corrected Optical System (Tube length: 200mm)
Viewing Head Ergo Tilting Trinocular Head, adjustable 0-35° inclined, interpupillary distance 47mm-78mm; splitting ratio Eyepiece:Trinocular=100:0 or 20:80 or 0:100
Seidentopf Trinocular Head, 30° inclined, interpupillary distance: 47mm-78mm; splitting ratio Eyepiece:Trinocular=100:0 or 20:80 or 0:100
Seidentopf Binocular Head, 30° inclined, interpupillary distance: 47mm-78mm
Eyepiece Super wide field plan eyepiece SW10X/25mm, diopter adjustable
Super wide field plan eyepiece SW10X/22mm, diopter adjustable
Extra wide field plan eyepiece EW12.5X/17.5mm, diopter adjustable
Wide field plan eyepiece WF15X/16mm, diopter adjustable
Wide field plan eyepiece WF20X/12mm, diopter adjustable
Objective NIS45 Infinite LWD Plan Semi-APO Objective (BF & DF), M26 5X/NA=0.15, WD=20mm
10X/NA=0.3, WD=11mm
20X/NA=0.45, WD=3.0mm
NIS45 Infinite LWD Plan APO Objective (BF & DF), M26 50X/NA=0.8, WD=1.0mm
100X/NA=0.9, WD=1.0mm
NIS60 Infinite LWD Plan Semi-APO Objective (BF), M25 5X/NA=0.15, WD=20mm
10X/NA=0.3, WD=11mm
20X/NA=0.45, WD=3.0mm
NIS60 Infinite LWD Plan APO Objective (BF), M25 50X/NA=0.8, WD=1.0mm
100X/NA=0.9, WD=1.0mm
Nosepiece Backward Sextuple Nosepiece (with DIC slot)
Condenser LWD condenser N.A.0.65
Transmitted Illumination 40W LED power supply with optical fiber light guide, intensity adjustable
Reflected Illumination Reflected light 24V/100W halogen lamp, Koehler illumination, with 6 position turret
100W halogen lamp house
Reflected light with 5W LED lamp, Koehler illumination, with 6 position turret
BF1 bright field module
BF2 bright field module
DF dark field module
Built-in ND6, ND25 filter and color correction filter
ECO Function ECO function with ECO button
Focusing Low-position coaxial coarse and fine focusing, fine division 1μm, Moving range 35mm
Stage 3 layers mechanical stage with clutching handle, size 14”x12” (356mmx305mm); moving range 356mmX305mm; Lighting area for transmitted light: 356x284mm.
Wafer holder: could be used to hold 12” wafer
DIC Kit DIC Kit for reflected illumination (can be used for 10X, 20X, 50X, 100X objectives)
Polarizing Kit Polarizer for reflected illumination
Analyzer for reflected illumination, 0-360° rotatable
Polarizer for transmitted illumination
Analyzer for transmitted illumination
Other Accessories 0.5X C-mount Adapter
1X C-mount Adapter
Dust Cover
Power Cord
Calibration slide 0.01mm
Specimen Presser

Note: ● Standard Outfit, ○ Optional

Sample Image

BS-4020 Industrial Inspection Microscope Sample1
BS-4020 Industrial Inspection Microscope Sample2
BS-4020 Industrial Inspection Microscope Sample3
BS-4020 Industrial Inspection Microscope Sample4
BS-4020 Industrial Inspection Microscope Sample5

Dimension

BS-4020 Dimension

Unit: mm

System Diagram

BS-4020 System Diagram

Certificate

mhg

Logistics

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